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Journal of Micro/Nanolithography, MEMS, and MOEMS

Silicon grating microfabrication for long-range displacement sensor
Author(s): Ali Khiat; F. Lamarque; C. Prelle; A. Phataralaoha; Jan Dittmer; T. Krah; Monika Leester-Schaedel; Stephanus Büttgenbach
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Paper Abstract

Silicon gratings are fabricated using micromachining techniques. The gratings are used with fiber optic probes to measure high-resolution and long-range linear displacements. Different parameters of the fabrication process such as the etching solution, the concentration of the etchant, and the temperature are optimized to achieve a mirror-like surface quality of the grating steps. For each parameter set, the resulting roughness and flatness are analyzed and discussed. Finally, linear displacement measurements are performed with the optimized grating as a component of a long-range fiber optic sensor. A resolution better than 34 nm and a measurement range up to 8.7 mm are obtained.

Paper Details

Date Published: 1 April 2008
PDF: 8 pages
J. Micro/Nanolith. 7(2) 021007 doi: 10.1117/1.2909459
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2
Show Author Affiliations
Ali Khiat, Univ. de Technologie de Compiègne (France)
F. Lamarque, Univ. de Technologie de Compiègne (France)
C. Prelle, Univ. de Technologie de Compiègne (France)
A. Phataralaoha, Technische Univ. Braunschweig (Germany)
Jan Dittmer, Technische Univ. Braunschweig (Germany)
T. Krah, Technische Univ. Braunschweig (Germany)
Monika Leester-Schaedel, Technische Univ. Braunschweig (Germany)
Stephanus Büttgenbach, Technische Univ. Braunschweig (Germany)

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