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Journal of Micro/Nanolithography, MEMS, and MOEMS

Adaptive scanning optical microscope: large field of view and high-resolution imaging using a MEMS deformable mirror
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Paper Abstract

For a wide range of applications in biology, medicine, and manufacturing, the small field of view associated with high-resolution microscope systems poses a significant challenge in practice. To address this limitation, a novel optical microscope uses a micromachined MEMS deformable mirror working with a specially designed scan lens to achieve a two-order-of-magnitude increase in the field of view area. Called the adaptive scanning optical microscope (ASOM), the deformable mirror in the ASOM is an integral component of the optical system and the static (glass) optical elements are specifically designed to match the shape correcting capabilities of the deformable mirror itself. After describing the design and operating principle of the ASOM, experimental results from a low-cost prototype are presented. It is shown how an image-based optimization method can be used to first calibrate the electrical voltages to the MEMS deformable mirror. And once calibrated, we show how the deformable mirror can be used in an open loop control approach for very fast operation during run time. The methods for calibration of a MEMS deformable mirror and basic control structures demonstrated form the basis for a range of emerging adaptive-optics-enabled technologies and instrumentation.

Paper Details

Date Published: 1 April 2008
PDF: 10 pages
J. Micro/Nanolith. 7(2) 021009 doi: 10.1117/1.2909451
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2
Show Author Affiliations
Benjamin M. Potsaid, Rensselaer Polytechnic Institute (United States)
John Ting-Yung Wen, Rensselaer Polytechnic Institute (United States)


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