Share Email Print

Journal of Micro/Nanolithography, MEMS, and MOEMS

New approaches for chip-to-chip interconnects: integrating porous silicon with MOEMS
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe two types of active optical devices developed for use as free-space optical interconnects FSOIs for chip-to-chip communications. The design of both types of devices—membrane and freestanding structures—includes both optical and mechanical components. The optical component contains porous silicon PSi with customized optical properties fabricated by electrochemical etching of silicon. The mechanical part of the devices is composed of metal/nitride bimorph thermal actuators. The membrane devices form concave mirrors when actuated, and can be used to focus the incoming optical signals and correct any optical misalignment within the input/output I/O fabric. The freestanding devices have out-of-plane optical components, whose tilting angle is controlled by the current applied to the actuator. These devices can function as either reflectors or tunable optical filters. By incorporating the developed PSi diffractive optical element DOE into the freestanding structure, another type of freestanding device is realized for beamsplitting applications. Details of the fabrication, testing, and integration of these PSi-based devices are presented.

Paper Details

Date Published: 1 April 2008
PDF: 8 pages
J. Micro/Nanolith. MEMS MOEMS 7(2) 021013 doi: 10.1117/1.2909279
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2
Show Author Affiliations
Da Song, SUNY/Univ. at Albany (United States)
Natalya Tokranova, SUNY/Univ. at Albany (United States)
Alison Gracias, SUNY/Univ. at Albany (United States)
James Castracane, SUNY/Univ. at Albany (United States)

© SPIE. Terms of Use
Back to Top