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Journal of Micro/Nanolithography, MEMS, and MOEMS

Tunable infrared detector with integrated micromachined Fabry-Perot filter
Author(s): Norbert Neumann; Martin Ebermann; Steffen Kurth; Karla Hiller
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Paper Abstract

We report the design, fabrication, and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the mid-wave infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of movable reflectors and spring configurations are fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength, and suitable filter bandwidth. Short and long cavity filters are designed for the spectral ranges of 3 to 4.3 μm and 3.7 to 5.0 μm, respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It is shown that the main challenge is to achieve a high finesse in spite of nonperfect parallelism, mirror curvature, and the additional phase shift caused by the Bragg reflectors.

Paper Details

Date Published: 1 April 2008
PDF: 9 pages
J. Micro/Nanolith. MEMS MOEMS 7(2) 021004 doi: 10.1117/1.2909206
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2
Show Author Affiliations
Norbert Neumann, InfraTec GmbH (Germany)
Martin Ebermann, InfraTec GmbH (Germany)
Steffen Kurth, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)

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