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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Packaging of optical fibers using microfabricated nickel clamps
Author(s): Xuhan Dai; Xiaolin Zhao; Guifu Ding; Hong Wang; Bingchu Cai

Paper Abstract

Reports the microfabricated nickel clamps for packaging of optical fibers in photonics devices. When the fiber is inserted into the silicon V groove, the microfricated clamps fix it in the V groove. Compared with the traditional silicon V grooves, this approach only involves one additional sputtering, photolithography, and electroplating process. Two single-mode optical fibers were fixed into the silicon V groove by the nickel clamp; the measured insertion loss is lower than 0.1 dB.

Paper Details

Date Published: 1 January 2008
PDF: 3 pages
J. Micro/Nanolith. MEMS MOEMS 7(1) 010501 doi: 10.1117/1.2896082
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 1
Show Author Affiliations
Xuhan Dai, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Hong Wang, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)

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