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Optical Engineering

Miniaturized InSb photovoltaic infrared sensor operating at room temperature
Author(s): Edson G. Camargo; Koichiro Ueno; Yoshifumi Kawakami; Yoshitaka Moriyasu; Kazuhiro Nagase; M. Sato; Hidetoshi Endo; Kazutoshi Ishibashi; Naohiro Kuze
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Paper Abstract

This paper reports the development of a novel InSb infrared photovoltaic sensor (PVS) operating at room temperature. The PVS consists of an InSb p+p-n+ structure grown on semi-insulating GaAs(100) substrate, with a p+-Al0.17In0.83Sb barrier layer between the p+ and p- layers to reduce diffusion of photoexcited electrons. Photodiodes were fabricated by wet etching, and, using a 500-K blackbody, we obtained detectivity D*=2.8×108 cm Hz1/2/W and responsivity RV=1.9 kV/W at room temperature. The SNR was improved with the serial connection of 700 photodiodes patterned on a 600×600-μm2 chip. On increasing the number N of connected photodiodes, the SNR was improved by a factor of N1/2. The responsivity was constant for signals ranging from dc to 500 Hz. From spectral response measurements a cutoff wavelength of 6.8 μm was obtained. The PVS was flip-chip bonded on pre-amplifier IC, allowing the shortest possible connection between the PVS and the pre-amplifier, making the system immune to electromagnetic noise. The system was finally encapsulated in a dual flat nonleaded package with a window, which exposes the back of the GaAs substrate, allowing the infrared light incidence. The device is small (2.2×2.7×0.7 mm3), operates at room temperature, and is able to detect human body radiation in the middle IR range.

Paper Details

Date Published: 1 January 2008
PDF: 7 pages
Opt. Eng. 47(1) 014402 doi: 10.1117/1.2828640
Published in: Optical Engineering Volume 47, Issue 1
Show Author Affiliations
Edson G. Camargo, Asahi Kasei EMD Corp. (Japan)
Koichiro Ueno, Asahi Kasei EMD Corp. (Japan)
Yoshifumi Kawakami, Asahi Kasei EMD Corp. (Japan)
Yoshitaka Moriyasu, Asahi Kasei EMD Corp. (Japan)
Kazuhiro Nagase, Asahi Kasei EMD Corp. (Japan)
M. Sato, Asahi Kasei EMD Corp. (Japan)
Hidetoshi Endo, Asahi Kasei EMD Corp. (Japan)
Kazutoshi Ishibashi, Asahi Kasei EMD Corp. (Japan)
Naohiro Kuze, Asahi Kasei Corp. (Japan)


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