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Journal of Micro/Nanolithography, MEMS, and MOEMS

Lens-cementing technology used in optical systems of deep-ultroviolet wavelength regions
Author(s): Takashi Takahashi; Toshiki Okumura; Etsuya Suzuki; Tatsuya Kojima; Hitoshi Suzuki; Toru Tojo; Koji Machida
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Paper Abstract

In this work, a newly developed optical lens cementing technology is reported. A fluoride material is used as an optical cement that can reduce damage from deep-ultraviolet (DUV) radiation. The degradation of transmittance and the surface quality of the cemented optical elements, including adhesive used for cementing, are evaluated after prolonged DUV irradiation. It is shown that with a 248-nm wavelength, this cement works quite well, up to 1000 h of operation, and the change in transmittance is negligible where average irradiation power is within 27 to 37 mW/cm2. Hence for all practical purposes, the use of this cement in microscope objectives is quite acceptable for 248-nm applications, thus confirming that this cementing technology is satisfactory and meets the performance requirement of DUV inspection systems.

Paper Details

Date Published: 1 October 2007
PDF: 6 pages
J. Micro/Nanolith. 6(4) 043010 doi: 10.1117/1.2804125
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 4
Show Author Affiliations
Takashi Takahashi, Topcon Corp. (Japan)
Toshiki Okumura, Topcon Corp. (Japan)
Etsuya Suzuki, Topcon Corp. (Japan)
Tatsuya Kojima, Topcon Corp. (Japan)
Hitoshi Suzuki, Topcon Corp. (Japan)
Toru Tojo, Topcon Corp. (Japan)
Koji Machida, Lasertec Corp. (Japan)


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