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Journal of Micro/Nanolithography, MEMS, and MOEMS

Governing equation and fabrication techniques for ionic conductive polymer films
Author(s): Nan-Chyuan Tsai; Chung-Yang Sue
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Paper Abstract

Dynamic analysis of sandwiched driving diaphragms, made of ionic conductive polymer (ICP), and an innovative fabrication technique to micromachine them are reported. The dynamics of ICP film (ICPF) is theoretically studied and described by governing equations via chemical and mathematical analysis. The purpose of deriving the governing equations is to explore the explicit relation of the induced lateral deflection of ICPF with respect to an applied electrical field. This is the first major issue of this report. The other major issue is ICPF fabrication technology. The device structure of the micropump unit, made of polydimethylsiloxane (PDMS), and the sandwiched ICPF are successfully integrated as a monolithic driving module by the proposed innovative fabrication technique. From the viewpoint of mass production, there are three challenging targets to be achieved. First, a novel method to fabricate ICPF actuators is developed to overcome the conventional defect: insufficient adhesion of coated electrodes upon ICPF. Second, the ICPF has to be restrained considerably to keep it straight and flat as it is fabricated, even though its thickness is far less than its length. Last, the ICPF has to operate in an aqueous environment. The proposed fabrication technique fully takes this into consideration.

Paper Details

Date Published: 1 October 2007
PDF: 7 pages
J. Micro/Nanolith. 6(4) 043008 doi: 10.1117/1.2804114
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 4
Show Author Affiliations
Nan-Chyuan Tsai, National Cheng Kung Univ. (Taiwan)
Chung-Yang Sue, National Cheng Kung Univ. (Taiwan)


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