Journal of Micro/Nanolithography, MEMS, and MOEMSComparison of three ANSYS finite element tools for analysis of MEMS micromirrors
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Finite element (FE) modeling of electrostatically actuated torsional and flexural-torsional microelectromechanical systems (MEMS) micromirrors is investigated by means of three different tools available in ANSYS FE modeling software, and numerical results are compared with static analytical solutions and existing experimental data. These methods include (a) a sequential coupled electrostatic and structural field tool, (b) a directly coupled electrostatic and structural field tool employing one-dimensional transducer element, and (c) a directly coupled electrostatic and structural field tool utilizing a two- or three-dimensional reduced order model. The torsional micromirror is 1000×250 μm2, and the flexural-torsional micromirror is 100×100 μm2. We present the advantages and disadvantages of these tools for MEMS micromirror modeling. These comparisons allow a selection to be made of the most suitable tool for a given modeling task and assess the accuracy of analytical solutions.