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Journal of Micro/Nanolithography, MEMS, and MOEMS

Micro angular rate sensor design and nonlinear dynamics
Author(s): Nan-Chyuan Tsai; Chung-Yang Sue; Chih-Che Lin
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Paper Abstract

We present an innovative micro gyroscope that is capable of detecting three-dimensional (3-D) angular motions. The motion of each sensing element is, by mechanical design, restricted to move in a direction orthogonal to each other such that measurements by high-resolution capacitors with signal processing circuits are decoupled and precisely represent, to some extent, angular velocity components in three axes. In order to ensure better repeatability and more reliability, the suspension flexures and stiffness are studied such that the stress of the proposed micro gyroscope is reduced, but the stroke of angular displacements is increased. Owing to the complicated geometry of the suspension flexures, the finite element method (FEM) is employed to obtain more exact stiffness value and compared with theoretical analysis. The dynamic model of the proposed gyroscope is established to include nonlinear terms and gyroscopic effects. The entire micro device can be produced merely by surface micromachining and wet etching such that the mass production cost has been considered at the design stage but the resolution, bandwidth, and decoupling capability of tri-axis detection are expected to be enhanced.

Paper Details

Date Published: 1 July 2007
PDF: 10 pages
J. Micro/Nanolith. 6(3) 033008 doi: 10.1117/1.2778645
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 3
Show Author Affiliations
Nan-Chyuan Tsai, National Cheng Kung Univ. (Taiwan)
Chung-Yang Sue, National Cheng Kung Univ. (Taiwan)
Chih-Che Lin, National Cheng Kung Univ. (Taiwan)


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