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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication and testing investigation of low-voltage integrated electrophoresis chip based on silicon-on-insulator-MEMS
Author(s): Yi Xu; Ji W. Shen; Jia L. Lu; Zhiyu Wen
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Paper Abstract

A new approach has been developed to fabricate a low-voltage integrated electrophoresis chip based on silicon-on-insulator micro electron mechanical systems (SOI-MEMS). Arrayed-electrodes are embedded along the microchannel sidewall in the designed microchip. Because voltage should be applied effectively to arrayed-electrodes to serve as the driving force for the on-microchip electrophoresis, electrical isolation between arrayed-electrodes is essential for a practicable low-voltage integrated electrophoresis chip. Fabrication of arrayed-electrodes becomes the critical technique that governs the performance of the low-voltage integrated electrophoresis chip. Combined with the SOI substrate, full dielectric isolation is proposed to obtain high-performance integrated three-dimensional (3-D) sidewall arrayed-electrodes. The fabrication processes mainly consist of SOI wafer fabrication, narrow trench etching, polysilicon refilling and planarization, boron diffusion to form arrayed-electrodes, elicitation and protection of arrayed-electrodes, dry etching to obtain reservoirs and microchannels, etc. In order to obtain high-quality electrical isolation between arrayed-electrodes, process experiments were conducted to obtain optimized operational parameters. Poly (dimethylsiloxane) (PDMS) was selected as a cover to achieve a hybrid electrophoresis chip. The validity of the hybrid electrophoresis chip was tested by amino acid separation. Results showed high performance of the fabricated low-voltage integrated electrophoresis chip based on SOI-MEMS.

Paper Details

Date Published: 1 July 2007
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 6(3) 033009 doi: 10.1117/1.2770459
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 3
Show Author Affiliations
Yi Xu, Chongqing Univ. (China)
Ji W. Shen, Chongqing Univ. (China)
Jia L. Lu, Chongqing Univ. (China)
Zhiyu Wen, Chongqing Univ. (China)

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