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Optical Engineering

Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups
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Paper Abstract

A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%.

Paper Details

Date Published: 1 August 2007
PDF: 5 pages
Opt. Eng. 46(8) 084601 doi: 10.1117/1.2769362
Published in: Optical Engineering Volume 46, Issue 8
Show Author Affiliations
Chien-Chung Lee, National Chiao Tung Univ. (Taiwan)
Yi Chiu, National Chiao Tung Univ. (Taiwan)
Han-Ping David Shieh, National Chiao Tung Univ. (Taiwan)


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