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Optical Engineering

Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results
Author(s): Daniele Spiga; Giovanni Pareschi; Vincenzo Cotroneo; Rodolfo Canestrari; Dervis Vernani; Alessandro Mirone; Claudio Ferrero; Claudio Ferrari; Laura Lazzarini
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Paper Abstract

The reflectance effectiveness of a multilayer depends strongly on the stack properties (thickness, roughness, and density of each layer) and can be directly tested by means of x-ray reflectivity scans at definite photon energies. The reflectivity curves are also a powerful tool for the in-depth, nondestructive characterization of the stack structure: The complex task of extracting the stack parameters from reflectivity curves can be achieved via a suitable best-fitting computer code based on a global automatic optimization procedure. We present the computer-assisted layer-by-layer analysis of the characteristics of Ni/C, Pt/C, and W/Si multilayers, based on x-ray reflectivity scans performed at 8.05 and 17.45 keV. In order to verify the correctness of the code predictions, we present also a comparison of the computer model with the transmission electron microscope profiles of the same multilayer samples.

Paper Details

Date Published: 1 August 2007
PDF: 11 pages
Opt. Eng. 46(8) 086501 doi: 10.1117/1.2769325
Published in: Optical Engineering Volume 46, Issue 8
Show Author Affiliations
Daniele Spiga, Osservatorio Astronomico di Brera (Italy)
Giovanni Pareschi, Osservatorio Astronomico di Brera (Italy)
Vincenzo Cotroneo, Osservatorio Astronomico di Brera (Italy)
Rodolfo Canestrari, Osservatorio Astronomico di Brera (Italy)
Dervis Vernani, Osservatorio Astronomico di Brera (Italy)
Alessandro Mirone, European Synchrotron Radiation Facility (France)
Claudio Ferrero, European Synchrotron Radiation Facility (France)
Claudio Ferrari, Consiglio Nazionale delle Ricerche (Italy)
Laura Lazzarini, Consiglio Nazionale delle Ricerche (Italy)

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