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Journal of Micro/Nanolithography, MEMS, and MOEMS

Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures
Author(s): Melanie M. Kessels; M. El Bouz; R. Pagan; Kevin J. Heggarty
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Paper Abstract

A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-μm feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.

Paper Details

Date Published: 1 July 2007
PDF: 12 pages
J. Micro/Nanolith. 6(3) 033002 doi: 10.1117/1.2767331
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 3
Show Author Affiliations
Melanie M. Kessels, Ecole Nationale Supérieure des Télécommunications Bretagne (France)
M. El Bouz, Ecole Nationale Supérieure des Télécommunications Bretagne (France)
R. Pagan, MIVA Technologies GmbH (Germany)
Kevin J. Heggarty, Ecole Nationale Supérieure des Télécommunications Bretagne (France)


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