Share Email Print

Optical Engineering

Improved polarization Mirau interference microscope
Author(s): Joanna Schmit; Parameswaran Hariharan
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The Mirau interference microscope features a very compact interferometer incorporated in a single microscope objective. We describe a simple modification that results in the exiting beams being orthogonally polarized. This modification makes it possible to introduce achromatic phase shifts in the two beams, facilitating the use of the Mirau interferometer for white-light phase-shifting interference microscopy.

Paper Details

Date Published: 1 July 2007
PDF: 3 pages
Opt. Eng. 46(7) 077007 doi: 10.1117/1.2751166
Published in: Optical Engineering Volume 46, Issue 7
Show Author Affiliations
Joanna Schmit, Veeco Instruments Inc. (United States)
Parameswaran Hariharan, Commonwealth Scientific & Industrial Research Organisation (United States)

© SPIE. Terms of Use
Back to Top