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Journal of Micro/Nanolithography, MEMS, and MOEMS

Period and height control during the microcontact printing of alkoxysilane for optical gratings
Author(s): Arnaud Benahmed; Robert Lam; Nicholaus Rechner; Chih-Ming Ho
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Paper Abstract

We present a one-step replication technique for optical gratings that allows the control of the corrugation height and period. By using an ink that slowly condenses into a multilayer polymer, it is possible to control the corrugation height by changing the condensation time. In addition, by applying a mechanical strain on the stamp, it is also possible to change the period of the grating. The combination of these two features added to the ease of use and low cost of this technique makes it very attractive for the fast prototyping of optical gratings for applications such as the measurement of surface plasmon band gaps. Corrugation heights in the range of 100 to 250 nm and period variations up to 10% are achieved.

Paper Details

Date Published: 1 April 2007
PDF: 5 pages
J. Micro/Nanolith. 6(2) 023007 doi: 10.1117/1.2731384
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 2
Show Author Affiliations
Arnaud Benahmed, Univ. of California/Los Angeles (United States)
Robert Lam, Univ. of California/Los Angeles (United States)
Nicholaus Rechner, Univ. of California/Los Angeles (United States)
Chih-Ming Ho, Univ. of California/Los Angeles (United States)


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