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Journal of Micro/Nanolithography, MEMS, and MOEMS

Modeling and analysis of a low-actuation-voltage MEM mirror with spring structure for tunable optical filter
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Paper Abstract

Tunable optical filters are key components for dense wavelength-division-multiplexed (DWDM) optical networks. One of the successful mechanisms to realize the wavelength tunability is by utilizing micro-electromechanical systems (MEMS) technology. The tuning mechanism works by applying a voltage between the top mirror and the bottom electrode. Micromechanically actuated optical filters are desirable because of their wide tuning range and process compatibility with other optoelectronic devices. Modeling and simulation play important roles in the MEMS domain. In this paper, we present four different mirror models. A detailed theoretical analysis including both static and dynamic aspects was developed on the four mirror models. A record tuning range of 149 nm with a very small actuation voltage of 2.5 V is achieved for the MEMS-based tunable optical filter.

Paper Details

Date Published: 1 April 2007
PDF: 8 pages
J. Micro/Nanolith. 6(2) 023011 doi: 10.1117/1.2731364
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 2
Show Author Affiliations
Mohammad A. Matin, Univ. of Denver (United States)
Yun-Bo Yi, Univ. of Denver (United States)
Vikram Gogte, Univ. of Denver (United States)

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