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Optical Engineering • Open Access

Phase-contrast microscopy by in-line phase-shifting digital holography: shape measurement of a titanium pattern with nanometer axial resolution
Author(s): Jeon Woong Kang; Chung-Ki Hong

Paper Abstract

Precision phase-contrast imaging has been achieved with in-line phase-shifting digital holographic microscopy. The complex amplitude of the object field on the charge-coupled device plane is measured by the phase-shifting method with a self-calibration algorithm, and the magnified object image is reconstructed with a plane wave expansion method. The phase fluctuation in the blank image without sample is 1.30 deg and the three-dimensional shape of a titanium phase test pattern is measured with an accuracy of 5.51 nm (corresponding to the phase resolution of 3.63 deg), which are better than those of off-axis systems.

Paper Details

Date Published: 1 April 2007
PDF: 3 pages
Opt. Eng. 46(4) 040506 doi: 10.1117/1.2731317
Published in: Optical Engineering Volume 46, Issue 4
Show Author Affiliations
Jeon Woong Kang, Pohang Univ. of Science and Technology (South Korea)
Chung-Ki Hong, Pohang Univ. of Science and Technology (South Korea)

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