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Journal of Micro/Nanolithography, MEMS, and MOEMS

E-Beam Direct-Write Lithography/Nanoimprint Lithography and Aviation
Author(s): Burn Jeng Lin
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Paper Details

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J. Micro/Nanolith. 6(1) 010101 doi: 10.1117/1.2718964
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 6, Issue 1, January 2007
Show Author Affiliations
Burn Jeng Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


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