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Optical Engineering

Noncontact thickness measurement of plane-parallel transparent plates with a lateral shearing interferometer
Author(s): Y. Pavan Kumar; Sanjib Chatterjee
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Paper Abstract

A technique for determination of the thickness of a plane-parallel transparent plate using a lateral shearing interferometer (LSI) is discussed. With this technique, the parallel plate whose thickness is to be determined is used to introduce a change in the collimation of the retro-reflected beam from an optical setup in which a corrected lens focuses an expanded collimated laser beam on the surface of a plane mirror placed at the back focal plane of the lens. The thickness of the plate is calculated by measuring the defocusing caused by the plate, which is inserted in the beam path between the collimating lens and the plane mirror, with an LSI. Results obtained for a parallel plate are presented.

Paper Details

Date Published: 1 March 2007
PDF: 5 pages
Opt. Eng. 46(3) 035602 doi: 10.1117/1.2716353
Published in: Optical Engineering Volume 46, Issue 3
Show Author Affiliations
Y. Pavan Kumar, Ctr. for Advanced Technology (India)
Sanjib Chatterjee, Ctr. for Advanced Technology (India)

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