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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication and measurement of wideband achromatic waveplates for the mid-infrared region using subwavelength features
Author(s): Robert Boye; Shanalyn A. Kemme; Joel Wendt; Alvaro Cruz-Cabrera; Gregory Allen Vawter; Charles R. Alford; Tony Carter; Sally Samora
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Paper Abstract

Subwavelength diffractive features etched into a substrate lead to form birefringence that can produce polarization sensitive elements such as wave plates. Using etched features allows for the development of pixelated devices to be used in conjunction with focal plane arrays in polarimetric imaging systems. Form birefringence exhibits dispersion that can be advantageous to the design of wave plates with an achromatic response. Taking advantage of this dispersion, diffractive wave plates with good achromatic characteristics can be designed for the 2- to 5-μm spectral region. Previous work in this area has produced good results over a subset of this wavelength band, but designing for this extended band is particularly challenging. The fabrication processes for the subwavelength features will be discussed and fabricated devices with a measured average phase retardation of 80.6 deg and rms variation of 9.41 deg will be presented.

Paper Details

Date Published: 1 October 2006
PDF: 6 pages
J. Micro/Nanolith. 5(4) 043007 doi: 10.1117/1.2397081
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 4
Show Author Affiliations
Robert Boye, Sandia National Labs. (United States)
Shanalyn A. Kemme, Sandia National Labs. (United States)
Joel Wendt, Sandia National Labs. (United States)
Alvaro Cruz-Cabrera, Sandia National Labs. (United States)
Gregory Allen Vawter, Sandia National Labs. (United States)
Charles R. Alford, Sandia National Labs. (United States)
Tony Carter, L&M Technologies, Inc. (United States)
Sally Samora, L&M Technologies, Inc. (United States)


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