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Optical Engineering

Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm
Author(s): Joanna Schmit; Parameswaran Hariharan
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Paper Abstract

We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities.

Paper Details

Date Published: 1 November 2006
PDF: 3 pages
Opt. Eng. 45(11) 115602 doi: 10.1117/1.2387882
Published in: Optical Engineering Volume 45, Issue 11
Show Author Affiliations
Joanna Schmit, Veeco Instruments Inc. (United States)
Parameswaran Hariharan, Commonwealth Scientific and Industrial Research Organisation (Australia)


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