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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Concise formula for the Zernike coefficients of scaled pupils
Author(s): Augustus J.E.M. Janssen; Peter Dirksen

Paper Abstract

Modern steppers and scanners have a projection lens whose numerical aperture (NA) can be varied so as to optimize the image performance for certain lithographic features. Thus a variable fraction of the aberrations is actually involved in the imaging process. In this letter, we present a concise formula for the NA scaling of the Zernike coefficients. In addition, we apply our results to the Strehl ratio.

Paper Details

Date Published: 1 July 2006
PDF: 3 pages
J. Micro/Nanolith. MEMS MOEMS 5(3) 030501 doi: 10.1117/1.2345672
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 3
Show Author Affiliations
Augustus J.E.M. Janssen, Philips Research Labs. (Netherlands)
Peter Dirksen, Philips Research Labs. (Belgium)

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