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Optical Engineering

Characterization of a self-mixing displacement sensor under moderate feedback
Author(s): Caroline Bès; Thierry M. Bosch; Guy Plantier; Francis Bony
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Paper Abstract

A displacement sensor enabling us to perform measurements under moderate feedback has been designed with a resolution up to 40 nm. Its performance can be optimized by using the wavelet transform when the signal is disturbed by electromagnetic fields, mechanical coupling, or speckle effect. By determining the repeatability and the reproducibility of this sensor, we have also demonstrated that this measuring device is suitable for statistical process control when an interval of tolerance of ±300 nm is required.

Paper Details

Date Published: 1 August 2006
PDF: 6 pages
Opt. Eng. 45(8) 084402 doi: 10.1117/1.2337575
Published in: Optical Engineering Volume 45, Issue 8
Show Author Affiliations
Caroline Bès, Ecole Nationale Supérieure d'Electrotechnique (France)
Thierry M. Bosch, Institut National Polytechnique de Toulouse (France)
Guy Plantier, ESEO (France)
Francis Bony, Ecole Nationale Supérieure d'Electrotechnique (France)

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