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Optical Engineering

Fabrication and tolerance reduction of a Si-based pickup module for optical storage
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Paper Abstract

We develop a miniaturized optical signal pickup module, with a working wavelength of 650 nm, and an image numerical aperture (NA) of 0.6, comprised of several SiNX optical phase elements on stacked Si substrates, for use in optical storage systems. The optical module, which is optical-on-axis and transmissible in both visible and infrared ranges, is designed to include not only a light source, but also diffractive optical elements (DOEs), which can be made with micro-optoelectromechanical systems (MOEMS) technology. Its optical operation is simulated by ray tracing to optimize the spot size (~0.6 µm) focused on the disk by adjusting the tolerance of each element in the alignment. All the Si-based transmission optical elements are fabricated and stacked by self-alignment bonding to reduce the tolerance of the assembled system. We obtain a circular focused spot when the full-width at half maximum (FWHM) of the zero-order beam is 3.1 µm; the diffraction limited spot size on the optical disk is 0.7 µm.

Paper Details

Date Published: 1 July 2006
PDF: 5 pages
Opt. Eng. 45(7) 074601 doi: 10.1117/1.2219105
Published in: Optical Engineering Volume 45, Issue 7
Show Author Affiliations
Chien Chieh Lee, National Central Univ. (Taiwan)
Chih-Ming Wang, National Central Univ. (Taiwan)
S. K. Huang, National Central Univ. (Taiwan)
Jenq-Yang Chang, National Central Univ. (Taiwan)
Gou Chung Chi, National Central Univ. (Taiwan)
S. C. Shu, National Central Univ. (Taiwan)
ChengYi Liu, National Central Univ. (Taiwan)

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