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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design, fabrication, and packaging of a practical multianalyte-capable optical biosensor
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Paper Abstract

A unique evanescent-wave biosensor was designed and fabricated using simple and robust microfabrication technology. The sensor uses a microscale optical waveguide fabricated from NOA61 that is surface-altered with a custom chemical modification process, coupled with modified self-assembly of an oxygen-sensitive fluorescent dye and the enzyme glucose oxidase. To interface the analyte with the waveguide surface, a multilayer PDMS fluidic mold was designed to fit over the waveguide. Interfacing of both optics and fluidics was achieved using novel-generic methods. The entire device has been successfully fabricated and assembled, with analyte response testing completed using glucose solutions. The system also demonstrated inherent random noise insensitivity while making measurements.

Paper Details

Date Published: 1 April 2006
PDF: 8 pages
J. Micro/Nanolith. 5(2) 021105 doi: 10.1117/1.2203666
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 2
Show Author Affiliations
David A. Chang-Yen, The Univ. of Utah (United States)
Bruce K. Gale, The Univ. of Utah (United States)


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