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Journal of Micro/Nanolithography, MEMS, and MOEMS

Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips
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Paper Abstract

We focus on the development and fabrication of SU8TM-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.

Paper Details

Date Published: 1 April 2006
PDF: 7 pages
J. Micro/Nanolith. 5(2) 021102 doi: 10.1117/1.2200674
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 2
Show Author Affiliations
Alison Gracias, SUNY/Univ. at Albany (United States)
Xiaojun Feng, SUNY/Univ. at Albany (United States)
Bai Xu, SUNY/Univ. at Albany (United States)
James Castracane, SUNY/Univ. at Albany (United States)


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