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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design of an electrostatic rotary comb actuator
Author(s): Jer-Liang Andrew Yeh; Jing-Yi Huang; Chi-Nan Chen; Chung-Yuen Hui
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Paper Abstract

We present an experimentally verified governing equation, which provides designers some physical insights of rotary comb actuated microsystems. The degree of rotation depends on a single dimensionless parameter, including electric moment applied, central ring radius, and radial spring constant. Radial spring constants, which differ from rotational spring constants typically used in other models, can be independently obtained using radial forces from simulation only. The rotation angles and the resonant frequencies are determined to be linearly proportional to the ring radius power of -0.16 and 0.08, respectively. As the rings become larger, both the angular spring constants and the resonant frequencies increase.

Paper Details

Date Published: 1 April 2006
PDF: 13 pages
J. Micro/Nanolith. 5(2) 023008 doi: 10.1117/1.2198532
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 2
Show Author Affiliations
Jer-Liang Andrew Yeh, Cornell Univ. (United States)
Jing-Yi Huang, National Tsing Hua Univ. (Taiwan)
Chi-Nan Chen, National Tsing Hua Univ. (Taiwan)
Chung-Yuen Hui, Cornell Univ. (United States)


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