Share Email Print
cover

Optical Engineering

Fabrication of large-sag aspheric micro-optics with nanometer accuracy using electron-beam lithography on curved substrates
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Smooth patterns were written into PMGI electron-beam resist using electron-beam lithography on BK7 blank concave mirror substrates, resulting in aspheric optics with sag as large as 4 µm. Interference microscope measurements revealed that the fabricated optics had height accuracy of 10 nm. These optics were designed for flattop mode shaping in laser resonators. Excellent performance of these optics has been demonstrated by testing them as fixed phase-conjugate mirrors outside laser resonators, as well as mode-shaping mirrors within laser resonators.

Paper Details

Date Published: 1 April 2006
PDF: 7 pages
Opt. Eng. 45(4) 043401 doi: 10.1117/1.2190627
Published in: Optical Engineering Volume 45, Issue 4
Show Author Affiliations
Zhaohui Yang, Univ. of Minnesota (United States)
James R. Leger, Univ. of Minnesota (United States)


© SPIE. Terms of Use
Back to Top