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Optical Engineering

Air-core hollow optical waveguides with omnidirectional reflectors
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Paper Abstract

We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO2 (0.111/0.258 µm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

Paper Details

Date Published: 1 April 2006
PDF: 3 pages
Opt. Eng. 45(4) 044601 doi: 10.1117/1.2189289
Published in: Optical Engineering Volume 45, Issue 4
Show Author Affiliations
Shih-Shou Lo, National Central Univ. (Taiwan)
Chii-Chang Chen, National Central Univ. (Taiwan)

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