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Optical Engineering

Imaging quality analysis of a KBA x-ray microscope working at grazing incidence
Author(s): Jiasheng Hu; Lingling Zhao; Xiang Li; Yuhong Bai
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Paper Abstract

In the last 20 years, x-ray imaging technology has developed to meet the needs of x-ray photoetching, spatial exploration, high-energy physics, and diagnosis of inertial confinement fusion. Because conventional imaging methods are not suitable in the x-ray range, grazing reflective imaging and coded aperture imaging methods have been adopted. In this paper, we describe the design of a noncoaxial grazing incidence KBA microscope. The microscope consists of two sets of spherical mirrors that scatter in orthogonal planes. An optical ray tracing program is used to analyze and evaluate the theoretical aberrations of the microscope. This allows us to optimize the x-ray imaging system. The analytical results provide a reliable foundation for determining the useful range and the manufacturing and assembly tolerances of the microscope.

Paper Details

Date Published: 1 April 2006
PDF: 7 pages
Opt. Eng. 45(4) 046502 doi: 10.1117/1.2188949
Published in: Optical Engineering Volume 45, Issue 4
Show Author Affiliations
Jiasheng Hu, Dalian Univ. of Technology (China)
Lingling Zhao, Dalian Univ. of Technology (China)
Xiang Li, Dalian Univ. of Technology (China)
Yuhong Bai

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