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Journal of Micro/Nanolithography, MEMS, and MOEMS

Exploration of the ultimate patterning potential of focused ion beams
Author(s): Jacques Giérak; Eric Bourhis; A. Madouri; Martin Strassner; Isabelle Sagnes; Sophie Bouchoule; M. N. Merat Combes; D. Mailly; Peter W. Hawkes; Ralf Jede; L. Bardotti; Brigitte Prevel; A. Hannour; P. Melinon; Annie Perez; Jacques Ferre; J. P. Jamet; A. Mougin; Claude Chappert; V. Mathet
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Paper Abstract

We aim to explore the nanostructuring potential of a highly focused pencil of ions. We show that focused ion beam technology (FIB) is capable of overcoming some basic limitations of current nanofabrication techniques and allowing innovative patterning schemes for nanoscience. In this work, we first detail the very high resolution FIB instrument developed specifically to meet nanofabrication requirements. Then we introduce and illustrate some new patterning schemes for next-generation FIB processing. These patterning schemes are: 1. nanoengraving of membranes as a template for nanopores and nanomask fabrication; 2. local defect injection for magnetic thin film direct patterning; 3. function of graphite substrates to prepare 2-D organized arrays of clusters; and 5. selective epitaxy of III-V semiconductors on FIB patterned surfaces. Finally, we show that FIB patterning allows "bottom-up" or "organization" processes.

Paper Details

Date Published: 1 January 2006
PDF: 11 pages
J. Micro/Nanolith. 5(1) 011011 doi: 10.1117/1.2181581
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 1
Show Author Affiliations
Jacques Giérak, Ctr. National de la Recherche Scientifique (France)
Eric Bourhis, Ctr. National de la Recherche Scientifique (France)
A. Madouri, Ctr. National de la Recherche Scientifique (France)
Martin Strassner, Lab. de Photonique et de Nanostructures (France)
Isabelle Sagnes, Lab. de Photonique et de Nanostructures (France)
Sophie Bouchoule, Ctr. National de la Recherche Scientifique (France)
M. N. Merat Combes, Lab. de Photonique et de Nanostructures (France)
D. Mailly, Ctr. National de la Recherche Scientifique (France)
Peter W. Hawkes, Ctr. National de la Recherche Scientifique (France)
Ralf Jede, Raith GmbH (Germany)
L. Bardotti, Univ. Claude Bernard Lyon 1 (France)
Brigitte Prevel, Univ. Claude-Bernard Lyon 1 (France)
A. Hannour, Univ. Claude Bernard Lyon 1 (France)
P. Melinon, Univ. Claude-Bernard Lyon 1 (France)
Annie Perez, Lab. d'Astronomie Spatiale/CNRS (France)
Jacques Ferre, Univ. Paris-Sud II (France)
J. P. Jamet
A. Mougin
Claude Chappert, CNRS-LPS and Univ. Paris Sud (France)
V. Mathet, Univ. Paris-Sud II (France)


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