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Journal of Micro/Nanolithography, MEMS, and MOEMS

Replication of deep x-ray lithography fabricated microstructures through casting of soft material
Author(s): Frederic Perennes; B. Marmirolli; Massimo Tormen; Maurizio Matteucci; Enzo M. Di Fabrizio
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Paper Abstract

We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20:1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

Paper Details

Date Published: 1 January 2006
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 5(1) 011007 doi: 10.1117/1.2176730
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 1
Show Author Affiliations
Frederic Perennes, Sincrotrone Trieste S.C.p.A. (Italy)
B. Marmirolli, Lab. Nazionale TASC/INFM (Italy)
Massimo Tormen, Lab. Nazionale TASC/INFM (Italy)
Maurizio Matteucci, Sincrotrone Trieste (Italy)
Enzo M. Di Fabrizio, Univ. degli studi Magna Græcia di Catanzaro (Italy)

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