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Journal of Micro/Nanolithography, MEMS, and MOEMS

Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication
Author(s): M. Worgull; Mathias P. Heckele; J. F. Hétu; K. K. Kabanemi
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Paper Abstract

Hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated using these processes. However, with increasing requirements regarding the embossing surface, and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by process simulation and experimentally. The present publication reports on the proceeding and present first results.

Paper Details

Date Published: 1 January 2006
PDF: 13 pages
J. Micro/Nanolith. 5(1) 011005 doi: 10.1117/1.2176729
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 1
Show Author Affiliations
M. Worgull, Forschungszentrum Karlsruhe (Germany)
Mathias P. Heckele, Forschungszentrum Karlsruhe (Germany)
J. F. Hétu, National Research Council Canada (Canada)
K. K. Kabanemi, National Research Council Canada (Canada)

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