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Optical Engineering

Accurate measurements at interferometric ellipsometer
Author(s): Galina A. Lysenko; Alexander V. Krioukov; Yuri Y. Kachurin; Vitaly V. Pogodaev
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Paper Abstract

It is known that the beamsplitter in interference ellipsometers is one of the possible sources of inaccuracy. In the general case, the polarizing effect of the beamsplitter adds systematic error to measurement results. Moreover, accurate measurements require such preliminary steps as precise determination of test specimen polarization axes and their alignment relative to the ellipsometer axes. We propose a new retardance measurement method that is free from these disadvantages. This becomes possible due to specimen rotation around the axis and constant interference signals tracking.

Paper Details

Date Published: 1 February 2006
PDF: 5 pages
Opt. Eng. 45(2) 023605 doi: 10.1117/1.2172352
Published in: Optical Engineering Volume 45, Issue 2
Show Author Affiliations
Galina A. Lysenko
Alexander V. Krioukov, Bauman Moscow State Technical Univ. (Russia)
Yuri Y. Kachurin, Bauman Moscow State Technical Univ. (Russia)
Vitaly V. Pogodaev, Bauman Moscow State Technical Univ. (Russia)


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