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Journal of Micro/Nanolithography, MEMS, and MOEMS

Optical characterization of diffractive optical elements replicated in polymers
Author(s): Sigitas Tamulevicius; Asta Guobiene; Giedrius Janusas; Arvydas Palevicius; Vytautas Ostasevicius; Mindaugas Andrulevicius
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Paper Abstract

We present an optical laser-based method to visualize replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass, and in replicated polymer substrates) is measured experimentally and simulated using linear dimensions of gratings, or their replica defined by atomic force microscopy (AFM). Diffraction efficiency of the periodic structure is used to test the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with computer simulations where the standard program (PCGrate-SX6.0) is employed. Angular dependence of relative efficiency (RE) appears a versatile tool to analyze the process of origination and replication of diffraction grating in a micrometer range. Both the shape of the grating and linear dimensions can be reconstructed by comparing experimental values of relative efficiency with the simulation results. Examples of hot embossing of different periods of diffraction gratings to the Al/polymethyl methacrylate (PMMA) on polyethylene terephthalate (PET) illustrate vitality of such approach.

Paper Details

Date Published: 1 January 2006
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 5(1) 013004 doi: 10.1117/1.2170098
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 5, Issue 1
Show Author Affiliations
Sigitas Tamulevicius, Kauno Technologijos Univ. (Lithuania)
Asta Guobiene, Kaunas Univ. of Technology (Lithuania)
Giedrius Janusas, Kauno Technologijos Univ. (Lithuania)
Arvydas Palevicius, Kauno Technologijos Univ. (Lithuania)
Vytautas Ostasevicius, Kauno Technologijos Univ. (Lithuania)
Mindaugas Andrulevicius, Kaunas Univ. of Technology (Lithuania)

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