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Optical Engineering

In-process inspection of surface-profile properties by detecting laser beam deflection
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Paper Abstract

An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6σ. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms.

Paper Details

Date Published: 1 January 2006
PDF: 5 pages
Opt. Eng. 45(1) 013601 doi: 10.1117/1.2150821
Published in: Optical Engineering Volume 45, Issue 1
Show Author Affiliations
Ryo Shinozaki, Core System Co., Ltd. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

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