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Journal of Micro/Nanolithography, MEMS, and MOEMS

Low-power MOEMS components for active optical systems
Author(s): James Castracane; Dong Yan; Seth C. Madison; Ganesh Panaman; Bai Xu
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Paper Abstract

The eventual widespread insertion of microoptoelectromechanical systems (MOEMS) into the marketplace rests fundamentally on the ability to produce viable components that maximize optical performance while minimizing power consumption and size. Active control of surface topology allows for one component to perform multiple functions, thus reducing cost and complexity. Based on the patented MEMS compound grating (MCG), extension of the research at the College of Nanoscale Science and Engineering (CNSE) at the University of Albany, New York, to novel designs, materials, and fabrication methods yielded low-power, high-performance prototypes. The main focus of this work is on the development of a polymer version (including a sacrificial layer, in some designs) of the MCG, which allows for ease of fabrication and a reduced electrostatic actuation voltage. Following a system design effort, several generations of the component are fabricated to optimize the process flow. Component metrology, electromechanical characterization, and initial results of optical tests are reported. A second example presented is the design and prototype fabrication of a spring micrograting using a customized SOI process. This highly flexible component builds on the MCG concept and yields an order of magnitude reduction in actuation voltage.

Paper Details

Date Published: 1 October 2005
PDF: 8 pages
J. Micro/Nanolith. MEMS MOEMS 4(4) 041702 doi: 10.1117/1.2121087
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
James Castracane, SUNY/Univ. at Albany (United States)
Dong Yan, SUNY/Univ. at Albany (United States)
Seth C. Madison, SUNY/Univ. at Albany (United States)
Ganesh Panaman, SUNY/Univ. at Albany (United States)
Bai Xu, SUNY/Univ. at Albany (United States)

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