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Journal of Micro/Nanolithography, MEMS, and MOEMS

Micromachined electromagnetic variable optical attenuator for optical power equalization
Author(s): Xuhan Dai; Xiaolin Zhao; Guifu Ding; Bingchu Cai
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Paper Abstract

A novel micromachined electromagnetic actuated variable optical attenuator is described. The attenuation level is adjusted by changing the lateral distance between two V-groove-aligned single-mode fibers. Based on the waveguide transmission theory, the relationship between the attenuation and the offset is analyzed. The fabrication of the device only enrolls common and well-known semiconductor technologies. The packaged volume of the device is 20×10×5 mm3. According to the experiment results, the insertion loss is less than 1 dB, the polarization dependent loss is less than 0.1 dB, dynamic range is larger than 50 dB, and the driving voltage is less than 5 V. It is proven to be a low-cost, high-performance passive device for future all-optical networks.

Paper Details

Date Published: 1 October 2005
PDF: 5 pages
J. Micro/Nanolith. MEMS MOEMS 4(4) 041304 doi: 10.1117/1.2120648
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
Xuhan Dai, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)

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