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Journal of Micro/Nanolithography, MEMS, and MOEMS

Closed-loop adaptive control for electrostatically driven torsional micromirrors
Author(s): Ke-Min Liao; Yi-Chih Wang; Chih-Hsien Yeh; Rongshun Chen
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Paper Abstract

We demonstrate a closed-loop adaptive control scheme for achieving accurate positioning and trajectory tracking of an electrostatically driven torsional micromirror. Compared to the conventional proportional-integral-derivative (PID) controller, the proposed adaptive self-tuning controller has advantages of on-line compensating parameter variations and model uncertainty of the torsional micromirror, resulting from fabrication imperfections. Numerical simulation results utilizing MATLAB indicate that the proposed adaptive controller has a better transient response and can more precisely follow the reference trajectory, compared to the PID control scheme. The torsional micromirror is designed and successfully fabricated using surface micromachining processes. Real-time experimental results demonstrate that the proposed adaptive control is feasible and can improve the performance of the micromirror.

Paper Details

Date Published: 1 October 2005
PDF: 9 pages
J. Micro/Nanolith. 4(4) 041503 doi: 10.1117/1.2110145
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
Ke-Min Liao, National Tsing Hua Univ. (Taiwan)
Yi-Chih Wang, National Tsing Hua Univ. (Taiwan)
Chih-Hsien Yeh, National Tsing Hua Univ. (Taiwan)
Rongshun Chen, National Tsing Hua Univ. (Taiwan)


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