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Journal of Micro/Nanolithography, MEMS, and MOEMS

Programmable diffraction gratings and their uses in displays, spectroscopy, and communications
Author(s): Stephen D. Senturia; David R. Day; Mike Butler; Malcolm Smith
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Paper Abstract

Microelectromechanical systems (MEMS) and optics are a natural match. There are several reasons: MEMS devices have dimensions and achievable actuation distances comparable to the wavelength of light; smooth-surfaced dielectrics, semiconductors, and metals can be used in various combinations; and, since redirection of photons does not require large forces, the relatively feeble MEMS actuators can easily manipulate them. Micro-optical-electromechanical systems (MOEMS) are those where optics merge with MEMS. Many MOEMS devices are based on mirror arrays that can be tilted using electrostatic actuation. This work, however, focuses on programmable diffraction gratings and their uses for projection displays, spectroscopy, and wavelength management in modern optical telecommunication systems.

Paper Details

Date Published: 1 October 2005
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 4(4) 041401 doi: 10.1117/1.2107687
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
Stephen D. Senturia, Polychromix, Inc. (United States)
David R. Day, Polychromix, Inc. (United States)
Mike Butler, Polychromix, Inc. (United States)
Malcolm Smith, Polychromix, Inc. (United States)


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