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Journal of Micro/Nanolithography, MEMS, and MOEMS

Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements
Author(s): Vytautas Ostasevicius; Sigitas Tamulevicius; Arvydas Palevicius; Minvydas Ragulskis; Viktoras Grigaliunas; Virgilijus Minialga
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Paper Abstract

The investigation of dynamics of microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS) is an important problem of engineering, technology, and metrology. Specifically, recent interest in applying MOEMS technology to the miniaturization of micromirrors, sensors, and actuators for variety of applications requires the design of appropriate testing and measurement tools for investigation of dynamic properties of those systems. Though MOEMS technology offers great promise in addressing the need for smaller dynamical systems, the development of new types of MOEMS structures is a very costly and complicated procedure. On the other hand, straight application of the principles of design of macromechanical systems is rather limited in MOEMS applications. Therefore, the application of measurement technologies capable of detecting the dynamic properties of microscale systems may help to understand and evaluate the functionality of the systems. Technological aspects of MOEMS design and methods of their characterization are presented.

Paper Details

Date Published: 1 October 2005
PDF: 9 pages
J. Micro/Nanolith. 4(4) 041602 doi: 10.1117/1.2107427
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
Vytautas Ostasevicius, Kauno Technologijos Univ. (Lithuania)
Sigitas Tamulevicius, Kauno Technologijos Univ. (Lithuania)
Arvydas Palevicius, Kauno Technologijos Univ. (Lithuania)
Minvydas Ragulskis, Kauno Technologijos Univ. (Lithuania)
Viktoras Grigaliunas, Kauno Technologijos Univ. (Lithuania)
Virgilijus Minialga, Kauno Technologijos Univ. (Lithuania)


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