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Journal of Micro/Nanolithography, MEMS, and MOEMS

MOEMS 3-D scan mirror for single-point control of beam deflection and focus
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Paper Abstract

A 1500-µm-diam silicon/silicon nitride 3-D scan mirror has been built using MOEMS technology. It is capable of static and dynamic beam scanning achieved with a biaxial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a 3-D space with one single optical surface, and is referred to as a MOEMS 3-D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. We describe the 3-D scan mirror design, fabrication, characterization, and briefly describe the target application. A confocal laser scanning microscope using this mirror to achieve beam scanning and focus control is also demonstrated.

Paper Details

Date Published: 1 October 2005
PDF: 7 pages
J. Micro/Nanolith. 4(4) 041502 doi: 10.1117/1.2107127
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 4
Show Author Affiliations
Yuhe Shao, Montana State Univ.-Bozeman (United States)
David L. Dickensheets, Montana State Univ.-Bozeman (United States)


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