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Optical Engineering

Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams
Author(s): Yilmaz Ozgur; Yuji Matsuura; Mitsunobu Miyagi
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Paper Abstract

A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

Paper Details

Date Published: 1 October 2005
PDF: 4 pages
Opt. Eng. 44(10) 106501 doi: 10.1117/1.2077047
Published in: Optical Engineering Volume 44, Issue 10
Show Author Affiliations
Yilmaz Ozgur, Tohoku Univ. (Japan)
Yuji Matsuura, Tohoku Univ. (Japan)
Mitsunobu Miyagi, Sendai National College of Technology (Japan)

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