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Journal of Micro/Nanolithography, MEMS, and MOEMS

Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer
Author(s): Deng-Huei Hwang; Kan-Ping Chin; Yi-Chung Lo; Wensyang Hsu
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Paper Abstract

An accelerometer with concise structure having a resonant microbeam to measure 2-D acceleration is proposed. This structure is configured with a central proof mass suspended by four symmetrical and orthogonal high-aspect-ratio (HAR) microbeams. This dual-axis design is able to decouple a two-axis signal from a 2-D acceleration. An analytical model relating the linear relationship between the acceleration and the associated resonant frequency shift of microbeam is derived, and a finite element analysis (FEA) is also performed to confirm this model. The FEA result also shows that there is little cross talk between x and y directions of measurement, meaning that this structure is able to decouple a planar 2-D acceleration into two independent acceleration components, and therefore the 1-D analytical model can be used to evaluate the 2-D acceleration on the x-y plane. In addition, the model is verified by testing results of one conventional dual-axis natural frequency shifted microaccelerometer (DFSM). The simulation result also shows that the sensitivity of the proposed HAR accelerometer is triple that of a conventional DFSM.

Paper Details

Date Published: 1 July 2005
PDF: 8 pages
J. Micro/Nanolith. 4(3) 033009 doi: 10.1117/1.2037070
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 3
Show Author Affiliations
Deng-Huei Hwang, NeoStones MicroFabrication Corp., Inc. (Taiwan)
Kan-Ping Chin, National Synchrotron Radiation Research Ctr. (Taiwan)
Yi-Chung Lo, National Synchrotron Radiation Research Ctr. (Taiwan)
Wensyang Hsu, National Chiao Tung Univ. (Taiwan)


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