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Journal of Micro/Nanolithography, MEMS, and MOEMS

High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems
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Paper Abstract

Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes readout by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits enables simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device is tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.

Paper Details

Date Published: 1 July 2005
PDF: 9 pages
J. Micro/Nanolith. 4(3) 031105 doi: 10.1117/1.2032888
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 4, Issue 3
Show Author Affiliations
Roderick R. Kunz, MIT Lincoln Lab. (United States)
Dennis D. Rathman, MIT Lincoln Lab. (United States)
Steven J. Spector, MIT Lincoln Lab. (United States)
Michael Rose, MIT Lincoln Lab. (United States)
Michael S. Yeung, Boston Univ. (United States)


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