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Optical Engineering

Phase-shifting method contrast calculations in time-averaged interferometry: error analysis
Author(s): Krzysztof Patorski; Zbigniew Sienicki; Adam R. Styk
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Paper Abstract

Numerical simulations of the influence of the phase step miscalibration and average intensity changes between the registered frames on the time-averaged interferogram contrast calculated using the temporal phase-shifting (TPS) method are presented. The amplitude of sinusoidal vibration studied by the time-averaged method is encoded in the interferogram contrast or intensity modulation described by the zero-order Bessel function. The properties of the TPS method used for contrast determination are established. Experimental studies of vibration mode patterns of silicon microelements with specular reflection surfaces provide corroboration of theoretical and numerical findings.

Paper Details

Date Published: 1 June 2005
PDF: 14 pages
Opt. Eng. 44(6) 065601 doi: 10.1117/1.1926887
Published in: Optical Engineering Volume 44, Issue 6
Show Author Affiliations
Krzysztof Patorski, Politechnika Warszawska (Poland)
Zbigniew Sienicki, Politechnika Warszawska (Poland)
Adam R. Styk, Politechnika Warszawska (Poland)

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