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Optical Engineering

Imaging properties of a patterned rough surface: effects of defocus
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Paper Abstract

A theoretical investigation of the effects of imaging a patterned rough surface through focus is performed, and the statistics of the image plane irradiance, as well as those of the image pattern printed in a threshold-type photoresist, are investigated. It is demonstrated that the line edge roughness in the printed image increases substantially as the image plane is moved out of focus, for both fully and partially coherent optical systems. Furthermore, the increase in line edge roughness occurs in what is considered to be an otherwise acceptable depth of focus for an ideal system.

Paper Details

Date Published: 1 June 2005
PDF: 10 pages
Opt. Eng. 44(6) 063201 doi: 10.1117/1.1922947
Published in: Optical Engineering Volume 44, Issue 6
Show Author Affiliations
Neil A. Beaudry, College of Optical Sciences/The Univ. of Arizona (United States)
Thomas D. Milster, College of Optical Sciences/The Univ. of Arizona (United States)


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