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Optical Engineering • Open Access

Optical micro-shadowgraph-based method for measuring micro-solderball height
Author(s): Shihua Wang; Chenggen Quan; Cho Jui Tay

Paper Abstract

An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained.

Paper Details

Date Published: 1 May 2005
PDF: 2 pages
Opt. Eng. 44(5) 050506 doi: 10.1117/1.1906003
Published in: Optical Engineering Volume 44, Issue 5
Show Author Affiliations
Shihua Wang, National Univ. of Singapore (Singapore)
Chenggen Quan, National Univ. of Singapore (Singapore)
Cho Jui Tay, National Univ. of Singapore (Singapore)

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