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Optical Engineering

Direct-write subwavelength structuring with femtosecond laser pulses
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Paper Abstract

Direct-write micro- and nanostructuring laser technologies are very important for the fabrication of new materials and multifunctional devices. Using tightly focused femtosecond laser pulses one can produce submicrometer holes and periodic structures in metals, semiconductors, and dielectrics on arbitrarily shaped surfaces. The achievable structure size is not restricted by the diffraction limit. It is determined by material properties and the laser pulse stability. We report investigations of possibilities to use femtosecond laser pulses for nanostructuring of different materials.

Paper Details

Date Published: 1 May 2005
PDF: 5 pages
Opt. Eng. 44(5) 051103 doi: 10.1117/1.1904053
Published in: Optical Engineering Volume 44, Issue 5
Show Author Affiliations
Jürgen Koch, Laser Zentrum Hannover e.V. (Germany)
Frank Korte, Laser Zentrum Hannover e.V. (Germany)
Carsten Fallnich, Laser Zentrum Hannover e.V. (Germany)
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)

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